August 8, 2022 Administrative Guidance to Tokyo Electron Limited

The Ministry of Internal Affairs and Communications (MIC) found that Tokyo Electron Limited (Representative Director, President & CEO: KAWAI Toshiki; Corporation Number: 4010401020757; head office in Minato Ward, Tokyo) and its subsidiary installed and operated industrial facilities emitting HF radio waves without obtaining permission from the Minister for Internal Affairs and Communications. Accordingly, MIC provided administrative guidance to the company today.

1. Party subject to administrative guidance

Tokyo Electron Limited (Representative Director, President & CEO: KAWAI Toshiki)

2. Reasons for guidance

It was found that Tokyo Electron Limited and its subsidiary installed and operated 793 units of devices which fall within the category of industrial facilities emitting HF radio waves, including high-frequency power sources, ozone gas generators, and induction heating systems that are integrated in plasma etching equipment, without obtaining permission from the Minister for Internal Affairs and Communications under Article 100, Paragraph 1 of the Radio Act (Act No. 131 of 1950).
From the perspective of preventing obstruction of other communications, the Radio Act provides that a person who wishes to install industrial facilities emitting HF radio waves must obtain permission from the Minister for Internal Affairs and Communications. Operating these facilities without the Minister's permission could fall under the penal provisions of Article 110, Item 4 of the Radio Act.
Accordingly, MIC provided administrative guidance to the company to prevent the recurrence.